$25
ASTM F2074-00
2000
Standard Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers (Withdrawn 2003)
- Format:
- Language(s) :
- Published :
- English
- 12/10/2000
This standard was transferred to SEMI (www.semi.org) May 2003
1.1 This guide defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials that contain flats or notches on the periphery. It was developed for use with silicon wafers with standard diameter and flat positions as given in SEMI Specifications M1.
1.2 It may be applied to other semiconductor wafers if the flat locations are properly taken into account.
1.3 Wafers of any size can be measured provided that suitable test jigs and instruments are available.
1.4 Roundness of wafers cannot be determined from measurements made solely at the positions defined in this guide. No information is provided concerning the diameter of the wafer at points other than those measured.
| ASTM F2074-00 | |
|---|---|
| STANDARD INFO: | |
| Standard Name | ASTM F2074-00 |
| Scope | Standard Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers (Withdrawn 2003) |
| Publisher | ASTM - ASTM International |
| Languages | English |
| State | [ Withdrawn ] |
| Publication Year | 2000 |
| Most recent Version | MOST RECENT |
| Whether to be replaced | |
| Addendum | |
| FILE INFO: | |
| File Size | 1 file , 41 KB |
| Note | This product is unavailable in Russia, Ukraine, Belarus |
| Number of Pages | 3 |
| Published | 12/10/2000 |
| ASTM F2074-00 | ||
|---|---|---|
| History | Publisher Year | |
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