CEI EN 62047-26

$26

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CEI EN 62047-26

2016

Most Recent

Semiconductor devices – Micro-electromechanical devices Part 26: Description and measurement methods for micro trench and needle structures

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This part of IEC 62047 specifies descriptions of trench structure and needle structure in a micrometer scale. In addition, it provides examples of measurement for the geometry of both structures. For trench structures, this standard applies to structures with a depth of 1 μm to 100 μm; walls and trenches with respective widths of 5 μm to 150 μm; and aspect ratio of 0,006 7 to 20. For needle structures, the standard applies to structures with three or four faces with a height, horizontal width and vertical width of 2 μm or larger, and with dimensions that fit inside a cube with sides of 100 μm.

This standard is applicable to the structural design of MEMS and geometrical evaluation after MEMS processes.

CEI EN 62047-26
STANDARD INFO:
Standard NameCEI EN 62047-26
ScopeSemiconductor devices - Micro-electromechanical devices Part 26: Description and measurement methods for micro trench and needle structures
PublisherCEI - Comitato Elettrotecnico Italiano
LanguagesEnglish
State[ Active ]
Publication Year2016
Most recent VersionMOST RECENT
Whether to be replaced
Addendum
FILE INFO:
Edition16
File Size1 file , 830 KB
Number of Pages36
Published11/01/2016
This document does not provide a preview.
CEI EN 62047-26
HistoryPublisher Year

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