$48
DIN IEC 62047-11 – DRAFT
2010
Draft Document – Semiconductor devices – Micro-electromechanical devices – Part 11: Test method for linear thermal expansion coefficients of MEMS materials (IEC 47F/49/CD:2010)
- Format:
- Language(s) :
- Published :
- German, English
- 06/01/2010
Draft Document – Semiconductor devices – Micro-electromechanical devices – Part 11: Test method for linear thermal expansion coefficients of MEMS materials (IEC 47F/49/CD:2010)
| DIN IEC 62047-11 – DRAFT | |
|---|---|
| STANDARD INFO: | |
| Standard Name | DIN IEC 62047-11 – DRAFT |
| Scope | Draft Document - Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for linear thermal expansion coefficients of MEMS materials (IEC 47F/49/CD:2010) |
| Publisher | DIN - DIN-adopted IEC Standard |
| Languages | German, English |
| State | |
| Publication Year | 2010 |
| Most recent Version | MOST RECENT |
| Whether to be replaced | |
| Addendum | |
| FILE INFO: | |
| File Size | 1 file , 3.2 MB |
| Number of Pages | 24 |
| Product Code(s) | 1700733, 1700733 |
| Published | 06/01/2010 |
| DIN IEC 62047-11 – DRAFT | ||
|---|---|---|
| History | Publisher Year | |
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